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Subject: LPCVD Reactors Available
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Date: 12/03/01 at 4:27 PM
Posted by: Roland Levy
Two vertical LPCVD reactors (a Kokusai Vertex-V model DJ 815V-8L and a TEL/Varian Alpha 8S) in excellent condition and suitable for MEMS R&D/manufacturing are available for sale. Both are high throughput, load-locked, cassette-to-cassette, fully automated units capable of handling up to 8" wafers. The Kokusai is configured to deposit PolySi and silicon nitride. The TEL/Varian is configured to deposit tantalum oxide. Both can readily be used for depositing all standard LPCVD processes including silica, doped glasses, silicon nitride, Polysi, titanium silicide, titanium nitride,etc... Interested parties may contact me by return e-mail or by calling me at (973) 596-3561.
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