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Subject: Stress in Gd PVD coatings

Date: 09/15/03 at 9:39 AM
Posted by: Svyatoslav Alimov
E-mail: alimovss@yahoo.com
Message Posted:

Does anybody know an experimental results on the transition pressure at which intrinsic stresses in the Gd films changes from compressive to the tensile ones? Films are approximately 1 mcm thick and deposited by planar RF magnetron.

I found the only record on this topic in one of the first papers of Hoffmann and Thornton but can't really find the basic and proved experimental data.

Thank you.

Svyatoslav Alimov.

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