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Subject: Stress in Gd PVD coatings
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Date: 09/15/03 at 9:39 AM
Posted by: Svyatoslav Alimov
Does anybody know an experimental results on the transition pressure at which intrinsic stresses in the Gd films changes from compressive to the tensile ones? Films are approximately 1 mcm thick and deposited by planar RF magnetron.
I found the only record on this topic in one of the first papers of Hoffmann and Thornton but can't really find the basic and proved experimental data.
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